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Tris(dimethylamino)silane 3DMAS 三(二甲氨基)硅烷

規格: 99.9%(99.9999%-Si)
CAS: 15112-89-7
產品編號: H35891
MDL: MFCD00048006
品牌: INFI

ALD簡介

   原子層沉(chen)積技術(Atomic Layer Deposition,簡稱ALD)是一種在納(na)米尺(chi)度(du)上進行薄膜沉積的先進技術。通過將物質以單原子形式一層一層的鍍在基底表面,擁有優異的三維共形性、大面積成膜的均勻性和精確控制膜厚等特點。

ALD應用

ALD在能源領域(yu)應(ying)用

2009年,Miyaska課題組將鈣鈦礦(kuang)(kuang)材(cai)料(liao)MAPbI3用作(zuo)燃料(liao)敏化太陽(yang)能電(dian)池(chi)(chi)(chi)的(de)光(guang)伏活性(xing)(xing)層,正式開啟了鈣鈦礦(kuang)(kuang)太陽(yang)能電(dian)池(chi)(chi)(chi)的(de)新紀元。ALD憑借其均(jun)勻成膜性(xing)(xing)、精準控制厚度和(he)保形(xing)性(xing)(xing)等多(duo)種優勢(shi),在(zai)光(guang)伏領域中發(fa)揮著(zhu)重要作(zuo)用。除此之外,ALD技術還可用于鋰電(dian)池(chi)(chi)(chi)薄膜涂層,提高(gao)電(dian)池(chi)(chi)(chi)性(xing)(xing)能

ALD在泛半導體應用

隨著泛(fan)半導體行(xing)業的發展,對(dui)微(wei)型(xing)化和(he)集成化要求越來(lai)越高,尺寸縮小至亞微(wei)米和(he)納米量(liang)級,ALD作為(wei)一種高精(jing)度薄(bo)膜(mo)沉(chen)積技術,可用于晶(jing)體(ti)管柵極電介質(zhi)層(ceng)(高K材料)、金屬柵電極、有機(ji)發光顯(xian)示器涂層(ceng)、銅互聯擴散阻擋層(ceng)、DRAM電介質(zhi)層(ceng)、微流體(ti)和MEMS涂層(ceng)、傳(chuan)感(gan)器等眾多領域。

ALD在光學領(ling)域應用

由于(yu) ALD 具有的三維共形沉積(ji)(ji)和(he)大面積(ji)(ji)均勻(yun)性特點,已成(cheng)功(gong)應用于高質(zhi)量光學(xue)(xue)薄膜(mo)(mo)、增(zeng)透膜(mo)(mo)、折射率可(ke)(ke)調的光學(xue)(xue)薄膜(mo)(mo)、波(bo)狀多(duo)層膜(mo)(mo),改善了光子晶體的光學(xue)(xue)性質(zhi)和(he)可(ke)(ke)控(kong)性,增(zeng)加(jia)了光子晶體在未來光學(xue)(xue)器件中的應用潛力。

 公司致力于ALD高(gao)純半導(dao)體薄(bo)(bo)膜(mo)前驅(qu)(qu)體材(cai)(cai)料(liao)的(de)自主(zhu)(zhu)研發和生產(chan)(chan),成(cheng)立(li)以來(lai),已陸續向多(duo)家半導(dao)體客戶(hu)(hu)提(ti)供了(le)百余(yu)種(zhong)前驅(qu)(qu)體新材(cai)(cai)料(liao),包(bao)括高(gao)純硅基前驅(qu)(qu)體系(xi)列、High-k前驅(qu)(qu)體系(xi)列產(chan)(chan)品(pin),部(bu)分新品(pin)已被客戶(hu)(hu)用(yong)于5nm以下(xia)制程薄(bo)(bo)膜(mo)設備。我們致力為客戶(hu)(hu)提(ti)供優質的(de)產(chan)(chan)品(pin)并(bing)建立(li)互信、長(chang)久(jiu)的(de)合作關系(xi),產(chan)(chan)品(pin)具有自主(zhu)(zhu)知識產(chan)(chan)權且原材(cai)(cai)料(liao)國(guo)產(chan)(chan)化,打破國(guo)外壟斷的(de)同(tong)時保證供應鏈的(de)安(an)全(quan)。研峰科(ke)技愿與國(guo)內芯片、高(gao)端顯示、光(guang)伏(fu)新能源等高(gao)端客戶(hu)(hu)一起攜手,解決高(gao)端半導(dao)體材(cai)(cai)料(liao)的(de)把脖子難題,早日實現(xian)進口替代。




Chemical NameTris(Dimethylamino)Silane
Synonym (Me2N)3SiH N,N,N',N',N'',N''-Hexamethylsilanetriamine TDMAS Tris(dimethylamido)silane Tris(dimethylamino)silane (Me2N)3SiH 三(二甲胺基)硅烷 N,N,N',N',N'',N''-Hexamethylsilanetriamine TDMAS Tris(dimethylamido)silane Tris(dimethylamido)silane (Me2N)3SiH N,N,N',N',N'', N''-Hexamethylsilanetriamine N,N,N',N',N'',N''-Hexamethylsilanetriamine TDMAS Tris(dimethylamido)silane
EC Number239-165-0
Chemical Name Translation三(二甲胺基)硅烷
Beilstein Registry Number1901643
PubChem Substance ID329758267
MDL NumberMFCD00048006
CAS Number15112-89-7
GHS Symbol
TYPE OF TEST            : LD50 - Lethal dose, 50 percent kill
ROUTE OF EXPOSURE       : Administration onto the skin
SPECIES OBSERVED        : Rodent - rabbit
DOSE/DURATION           : 477 mg/kg
TOXIC EFFECTS :
   Lungs, Thorax, or Respiration - chronic pulmonary edema
   Liver - other changes
   Nutritional and Gross Metabolic - weight loss or decreased weight gain
REFERENCE :
   TIHEEC Toxicology and Industrial Health.  (Princeton Scientific Pub. Co.,
   POB 2155, Princeton, NJ 08540)  V.1-    1985-  Volume(issue)/page/year:
   5,45,1989

TYPE OF TEST            : LD50 - Lethal dose, 50 percent kill
ROUTE OF EXPOSURE       : Oral
SPECIES OBSERVED        : Rodent - rat
DOSE/DURATION           : 594 mg/kg
TOXIC EFFECTS :
   Lungs, Thorax, or Respiration - dyspnea
   Gastrointestinal - other changes
   Nutritional and Gross Metabolic - weight loss or decreased weight gain
REFERENCE :
   TIHEEC Toxicology and Industrial Health.  (Princeton Scientific Pub. Co.,
   POB 2155, Princeton, NJ 08540)  V.1-    1985-  Volume(issue)/page/year:
   5,45,1989

TYPE OF TEST            : LC50 - Lethal concentration, 50 percent kill
ROUTE OF EXPOSURE       : Inhalation
SPECIES OBSERVED        : Rodent - rat
DOSE/DURATION           : 38 ppm/6H
TOXIC EFFECTS :
   Sense Organs and Special Senses (Eye) - lacrimation
   Behavioral - ataxia
   Gastrointestinal - changes in structure or function of salivary glands
REFERENCE :
   TIHEEC Toxicology and Industrial Health.  (Princeton Scientific Pub. Co.,
   POB 2155, Princeton, NJ 08540)  V.1-    1985-  Volume(issue)/page/year:
   5,45,1989

WGK Germany3
Hazard statements
  • H314 Causes severe skin burns and eye damage 導致嚴重的皮膚灼傷和眼睛損傷
  • H330 Fatal if inhaled 吸入致命
  • H311 Toxic in contact with skin 皮膚接觸中毒
  • H261 In contact with water releases flammable gas 與水接觸時釋放可燃氣體。
  • H225 Highly flammable liquid and vapour 高度易燃液體和蒸氣
  • H302 Harmful if swallowed 吞食有害
    Personal Protective Equipment Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter
    RTECSVV5800000
    Precautionary statements
    • P402+P404
    • P231+P232
    • P280 Wear protective gloves/protective clothing/eye protection/face protection. 戴防護手套/防護服/眼睛的保護物/面部保護物。
    • P210 Keep away from heat/sparks/open flames/hot surfaces. — No smoking. 遠離熱源/火花/明火/熱的表面。——禁止吸煙。
    • P370+P378
    • P403+P235
    • P260 Do not breathe dust/fume/gas/mist/vapours/spray. 不要吸入粉塵/煙/氣體/煙霧/蒸汽/噴霧。
    • P284 Wear respiratory protection.? 佩戴呼吸保護裝置。
    • P422 Store contents under… 存儲目錄在…之下。
      Signal word Danger
      Hazard Codes F,C
      Safety Statements
      • S45 In case of accident or if you feel unwell seek medical advice immediately (show the label where possible) 發生事故時或感覺不適時,立即求醫(可能時出示標簽);
      • S26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 眼睛接觸后,立即用大量水沖洗并征求醫生意見;
      • S36/37/39 Wear suitable protective clothing, gloves and eye/face protection 穿戴適當的防護服、手套和眼睛/面保護;
      • S43 In case of fire use ... (indicate in the space the precise type of fire-fighting equipment. If water increases the risk add -?Never use water) 著火時使用(指明具體的消防器材種類,如果用水增加危險,注明“禁止用水”
      • S16 Keep away from sources of ignition - No smoking 遠離火源,禁止吸煙;
        Risk Statements
        • R11 Highly flammable 非常易燃
        • R20 Harmful by inhalation 吸入有害
        • R29 Contact with water liberates toxic gas. 遇水釋放出有毒氣體
        • R34 Causes burns 會導致灼傷
        • R52/53
        • R15 Contact with water liberates extremely flammable gases 遇水會釋放出極端易燃的氣體
          Restrict 危險品
          15112-89-7 H35891 Tris(dimethylamino)silane 3DMAS
三(二甲氨基)硅烷

          化學屬性

          Melting Point-90 °C (lit.)
          Mol. Formula[(CH3)2N]3SiH
          Mol. Weight161
          Density0.84
          Flash Point77°F
          Appearance colorless to light yellow liq.
          Boiling Point145-148°C (4°C/16mm)
          Stabilityair sensitive, moisture sensitive
          Danger-Level-
          pH-:-
          Redox-

          *以上(shang)化(hua)合物性質及(ji)應用等(deng)信息僅供(gong)參考